Determination of optimal crystallographic orientations for LiNbO 3 and LiTaO 3 bimorph actuators
The actuators for precise positioning based on bimorph structures of piezoelectric LiNbOinline-formula3 and LiTaOinline-formula3 crystals are considered. The optimal orientations of the actuator plates ensuring the highest possible displacements are determined by the extreme surfaces technique and the finite-element method. The simulated displacements for optimal orientations of LiNbOinline-formula3 and LiTaOinline-formula3 plates are compared with those obtained experimentally for manufactured LiNbOinline-formula3 and LiTaOinline-formula3 actuators, whose orientations are not optimal. As is shown, the optimal configuration of the actuator allows us to significantly increase its displacement for both LiNbOinline-formula3 and LiTaOinline-formula3 specimens.
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